Slim-type 100nm resolution stage (50mm)
Built-in encoder! High-resolution positioning stage
It is equipped with an in-house developed optical linear scale encoder, allowing it to operate with a resolution of 100 nm or 50 nm when controlled by the controller. This is a custom example of a slim model in the direction of travel. Benefits of being slim: - Space-saving with a long stroke - Securing space on the reference plane - Miniaturization of inspection equipment
